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Hsin-Yu Wu, Chia-Hsun Hsu, Shui-Yang Lien and Yeu-Long Jiang
In this study, metal films are fabricated by using an in-line reactive direct current magnetron sputtering system. The aluminum?titanium (AlTi) back contacts are prepared by changing the pressure from 10 mTorr to 25 mTorr. The optical, electrical and str...
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