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Federica Vurchio, Pietro Ursi, Francesco Orsini, Andrea Scorza, Rocco Crescenzi, Salvatore A. Sciuto and Nicola P. Belfiore
Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. H...
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