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Harald Hetzner, Christoph Schmid, Stephan Tremmel, Karsten Durst and Sandro Wartzack
Tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W) were deposited on high speed steel by reactive magnetron sputtering of a tungsten carbide target in an argon-ethine atmosphere. The deposition parameters, sputtering power, bias voltage, ...
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