3   Artículos

Separation algorithm for a 2D refractive index distribution and thickness profile of a phase object by laser diode-based multiwavelength interferometry

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS    Formato: Impreso

Tabla de contenido: Vol: 80 Num: 5 Par: 0 Año: 2009

Realization and performance evaluation of high speed autofocusing for direct laser lithography

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS    Formato: Impreso

Tabla de contenido: Vol: 80 Num: 7 Par: 0 Año: 2009

300 mm reference wafer fabrication by using direct laser lithography

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS    Formato: Impreso

Tabla de contenido: Vol: 79 Num: 10 Par: 0 Año: 2008