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Ph. V. Kiryukhantsev-Korneev, Zh. S. Amankeldina, A. N. Sheveyko, S. Vorotilo and E. A. Levashov
Boron and oxygen-doped Cr?Al?Ti?N coatings were deposited by closed field unbalanced magnetron sputtering (CFUBMS) of TiB target manufactured by self-propagating high-temperature synthesis, and Ti, Cr, and Al targets. To evaluate the influence of doping ...
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Jicheng Ding, Tengfei Zhang, Je Moon Yun, Myung Chang Kang, Qimin Wang and Kwang Ho Kim
CrN and Cr-Al-Si-N coatings were deposited on SUS304 and Si-wafers by a hybrid coating system. The Cr and Al-Si target were connected to the cathode arc ion plating (AIP) and high power impulse magnetron sputtering (HiPIMS), respectively. Various Al and ...
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