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Abdelrahman S. Abdeldayem, Salma I. Salah, Omar A. Aqel, Martin T. White and Abdulnaser I. Sayma
Supercritical carbon dioxide (sCO2) can be mixed with dopants such as titanium tetrachloride (TiCl4), hexafluoro-benzene (C6F6), and sulphur dioxide (SO2) to raise the critical temperature of the working fluid, allowing it to condense at ambient temperat...
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Jeongwoo Park, Neung Kyung Yu, Donghak Jang, Eunae Jung, Hyunsik Noh, Jiwon Moon, Deoksin Kil and Bonggeun Shong
Various processes based on atomic layer deposition (ALD) have been reported for growing Ti-based thin films such as TiN and TiO2. To improve the uniformity and conformity of thin films grown via ALD, fundamental understanding of the precursor?substrate s...
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Tuung Luoh, Yu-Kai Huang, Yung-Tai Hung, Ling-Wuu Yang, Ta-Hone Yang and Kuang-Chao Chen
Titanium nitride (TiN) not only was utilized in the wear-resistant coatings industry but it was also adopted in barrier processes for semiconductor manufacturing. Barrier processes include the titanium (Ti) and TiN processes, which are commonly used as d...
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DS van Vuuren, SJ Oosthuizen, MD Heydenrych
Pág. 141
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P. Billik and G. P
Pág. 979 - 982
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