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Lucía Díaz-Pérez, Marta Torralba, José Antonio Albajez and José Antonio Yagüe-Fabra
A novel nanopositioning platform (referred as NanoPla) in development has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. Two-dimensional (2D) movement is performed by four custom-made Halbach linear motors, and a...
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