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Liam Ward, Fabian Junge, Andreas Lampka, Mark Dobbertin, Christoph Mewes and Marion Wienecke
In this study diamond like carbon (DLC) coatings with Si interlayers were deposited on 316L stainless steel with varying gas pressure and substrate bias voltage using plasma enhanced chemical vapor deposition (PECVD) technology. Coating and interlayer th...
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