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Evgeniya Ermakova, Sergey Sysoev, Irina Tsyrendorzhieva, Alexander Mareev, Olga Maslova, Vladimir Shayapov, Eugene Maksimovskiy, Irina Yushina and Marina Kosinova
We report an investigation into 1,4-Bis-N,N-(trimethylsilyl)piperazine (BTMSP) as a novel precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD). The thermal stability, temperature dependence of vapor pressure and th...
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