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Qi Hao, Xiuhua Fu, Shigeng Song, Des Gibson, Cheng Li, Hin On Chu and Yongjing Shi
TiO2 deposition using separate regions for sputtering and oxidation is not well investigated. We optimized process parameter for such as oxygen flow and microwave power to produce high quality TiO2 filters for Stereo/3D imaging applications. This deposit...
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Ben Wang, Xiuhua Fu, Shigeng Song, Hin On Chu, Desmond Gibson, Cheng Li, Yongjing Shi and Zhentao Wu
Optimization of thin film uniformity is an important aspect for large-area coatings, particularly for optical coatings where error tolerances can be of the order of nanometers. Physical vapor deposition is a widely used technique for producing thin films...
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