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Ali Salimian, Evan Haine, Cova Pardo-Sanchez, Abul Hasnath and Hari Upadhyaya
The spectral emission data from the plasma glow of various sputtering targets containing indium oxide, zinc oxide, and tin oxide were obtained. The plasma was generated at various power and chamber pressures. These spectral data were then converted into ...
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Ali Salimian, Arjang Aminishahsavarani and Hari Upadhyaya
We implemented deep learning models to examine the accuracy of predicting a single feature (sheet resistance) of thin films of indium-doped zinc oxide deposited via plasma sputter deposition by feeding the spectral data of the plasma to the deep learning...
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Hoe-Kun Kim, Sung-Min Kim and Sang-Yul Lee
The CrZrN/CrZrSiN multilayer coatings at a bilayer period range decreasing from 1.35 µm to 0.45 µm were synthesized on a Si (100) wafer and WC-6 wt.% Co substrate using a closed-field unbalanced magnetron sputter, and the thickness effects on the mechani...
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Handan Huang, Li Jiang, Yiyun Yao, Zhong Zhang, Zhanshan Wang and Runze Qi
The laterally graded multilayer collimator is a vital part of a high-precision diffractometer. It is applied as condensing reflectors to convert divergent X-rays from laboratory X-ray sources into a parallel beam. The thickness of the multilayer film var...
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Elena Alexandra Serban, Aditya Prabaswara, Justinas Palisaitis, Per Ola Åke Persson, Lars Hultman, Jens Birch and Ching-Lien Hsiao
Selective-area grown, catalyst-free GaN nanorod (NR) arrays grown on Si substrates have been realized using liquid-target reactive magnetron sputter epitaxy (MSE). Focused ion beam lithography (FIBL) was applied to pattern Si substrates with TiNx masks. ...
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Grégory Abadias, Firat Angay, Rubenson Mareus and Cédric Mastail
In this study, polycrystalline hafnium nitride (HfN) thin films were grown by oblique angle deposition (OAD) technique to investigate the relationship between column tilt angle, texture development and residual stress evolution with varying inclination a...
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Pinggui Wang, Xiuhua Fu, Des Gibson, Lewis Fleming, Sam Ahmadzadeh, Cheng Li, Manu Muhiyudin, Shigeng Song, David Hutson, David Moodie, Calum MacGregor and Matthew Steer
In this work, performance improvements are described for a low-power consumption non-dispersive infrared (NDIR) methane (CH4) gas sensor using customised optical thin film bandpass filters (BPFs) centered at 3300 nm. BPFs shape the spectral characteristi...
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Ming Cao, Lan Zhao, Libin Wu and Wenquan Wang
The increasing demands of environmental protection have led to solid lubricant coatings becoming more and more important. A new type of MoS2-based coating co-doped with Cu and Al prepared by magnetron sputtering, including Cu/MoS2 and Cu-Al/MoS2 coatings...
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Heike Bartsch, Rolf Grieseler, Jose Mánuel, Jörg Pezoldt and Jens Müller
This work compares the deposition of aluminum nitride by magnetron sputtering on silicon to multilayer ceramic substrates. The variation of sputter parameters in a wide range following a fractional factorial experimental design generates diverse crystall...
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M. Nur-E-Alam, Mikhail Vasiliev and Kamal Alameh
Highly bismuth-substituted iron garnet thin films are prepared on quartz substrates by using a radio frequency (RF) magnetron sputtering technique. We study the factors (process parameters associated with the RF magnetron sputter deposition technique) af...
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