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Suresh Kumar, Samar Mondal, Anil Kumar, Ashok Ranjan and Namburi Eswara Prasad
Tantalum carbide (TaC) and silicon carbide (SiC) layers were deposited on a graphite tube using a chemical vapor deposition process. Tantalum chloride (TaCl5) was synthesized in situ by reacting tantalum chips with chlorine at 550 °C. TaC was deposited b...
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