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Ben Wang, Xiuhua Fu, Shigeng Song, Hin On Chu, Desmond Gibson, Cheng Li, Yongjing Shi and Zhentao Wu
Optimization of thin film uniformity is an important aspect for large-area coatings, particularly for optical coatings where error tolerances can be of the order of nanometers. Physical vapor deposition is a widely used technique for producing thin films...
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