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Victor D. Telekh, Aleksei V. Pavlov, Daniil V. Kirillov, Evgeny V. Vorob?ev, Alexander G. Turyanskiy, Viacheslav M. Senkov, Petr A. Tsygankov, Freddy F. Parada-Becerra, Vladimir R. Vesnin and Andrei S. Skriabin
This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers we...
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