|
|
|
|
|
Basit Abdul, Vincenzo Mariano Mastronardi, Antonio Qualtieri, Luciana Algieri, Francesco Guido, Francesco Rizzi and Massimo De Vittorio
In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functional ...
ver más
|
|
|
|
|