|
|
|
|
|
Yu-Hsuan Hung, Hung-Liang Chien and Yung-Chun Lee
An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask p...
ver más
|
|
|
|
|