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Heike Bartsch, Rolf Grieseler, Jose Mánuel, Jörg Pezoldt and Jens Müller
This work compares the deposition of aluminum nitride by magnetron sputtering on silicon to multilayer ceramic substrates. The variation of sputter parameters in a wide range following a fractional factorial experimental design generates diverse crystall...
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Baras, T.; Mueller, J.; Jacob, A. F.
Pág. 2766 - 2772
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Pergola, L.; Gindera, R.; Jager, D.; Vahldieck, R.
Pág. 579 - 587
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Tsai, Y.-S.; Horng, T.-S.
Pág. 4412 - 4421
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Ruiz-Cruz, J.A.; Sabbagh, M.A.E.; Zaki, K.A.; Rebollar, J.M.; Yunchi Zhang
Pág. 174 - 182
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Tang, C.-W.
Pág. 617 - 624
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Yo-Shen Lin; Chien-Chang Liu; Ko-Mai Li; Chun Hsiung Chen
Pág. 2718 - 2724
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Wu, K.-L. Zhao, Y.-J. Wang, J. Cheng, M. K. K.
Pág. 393 - 402
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Horng, T.-S. Wu, J.-M. Yang, L.-Q. Fang, S.-T.
Pág. 2327 - 2333
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Heyen, J. von Kerssenbrock, T. Chernyakov, A. Heide, P. Jacob, A. F.
Pág. 2589 - 2596
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