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Xiaohui Yang, Philipp Kästner, Eireen Käkel, Marek Smolarczyk, Shujie Liu, Qingdang Li and Hartmut Hillmer
For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed. Three-dimensional electromechanical modeling including many non-...
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