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Bong-Jun Choi, Ju-Hwan Kim, Woo-Jin Yang, Dong-Jun Han, Jaewon Park and Dong-Wook Park
Miniaturized flexible microelectrode arrays are desirable for small-area surface electromyography (sEMG) to detect the electrical activity generated by muscles in a specific area of the body. Here, we present a flexible 8-channel microelectrode array wit...
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Basit Abdul, Vincenzo Mariano Mastronardi, Antonio Qualtieri, Luciana Algieri, Francesco Guido, Francesco Rizzi and Massimo De Vittorio
In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functional ...
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Andreas Reichel, Gerhard Franz and Markus-Christian Amann
Parylene, a non-critical, non-toxic layer material, which is not only a candidate for low-\(K\) dielectrics, but also well suited for long-term applications in the human body, has been deposited by (plasma-enhanced) chemical vapor deposition of the monom...
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A. F. Lopeandia, E. André, J.-L. Garden, D. Givord, and O. Bourgeois
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