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Jicheng Ding, Tengfei Zhang, Je Moon Yun, Myung Chang Kang, Qimin Wang and Kwang Ho Kim
CrN and Cr-Al-Si-N coatings were deposited on SUS304 and Si-wafers by a hybrid coating system. The Cr and Al-Si target were connected to the cathode arc ion plating (AIP) and high power impulse magnetron sputtering (HiPIMS), respectively. Various Al and ...
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