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Chaoqun Wang, Qiangxian Huang, Xuemeng Ding, Rongjun Cheng, Liansheng Zhang, Ruijun Li and Hongli Li
A homodyne interferometer is one of the most important tools in nanometre measurements. However, its nonlinear error seriously affects measurement accuracy at the sub-nanometre level. As one of the dominant factors that cause nonlinear error in a homodyn...
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