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Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. H...
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Cristina Potrich, Lorenzo Lunelli, Alvise Bagolini, Pierluigi Bellutti, Cecilia Pederzolli, Matteo Verotti and Nicola Pio Belfiore
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Mohd Nashrul Mohd Zubir, Bijan Shirinzadeh, and Yanling Tian
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