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Qi Hao, Xiuhua Fu, Shigeng Song, Des Gibson, Cheng Li, Hin On Chu and Yongjing Shi
TiO2 deposition using separate regions for sputtering and oxidation is not well investigated. We optimized process parameter for such as oxygen flow and microwave power to produce high quality TiO2 filters for Stereo/3D imaging applications. This deposit...
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