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Zifeng Li, Guotan Liu, Guanqi Liu, Xiaoshuo Zhu and Yudong Fu
Nb-Si-C thin films were deposited onto Si(001) substrates by radio frequency (RF) magnetron sputtering using individual Nb, Si, and C targets. The effects of varying the sputtering power on the phase composition of the new thin films were studied. The st...
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