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Baek-Ju Lee, Kyu-Beom Lee, Min-Ho Cheon, Dong-Won Seo and Jae-Wook Choi
In this study, we conducted research on manufacturing molybdenum (Mo) thin films by a thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films are widely used as gate electrodes and electrodes in metal-oxide semiconductor ...
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Chao Zhao and Jinjuan Xiang
Metal gate of CMOS devices.
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Ana L. Cuevas, María del Valle Martínez de Yuso, Víctor Vega, Ana Silvia González, Víctor M. Prida and Juana Benavente
Optical changes associated with the surface coating of different metal oxides and nanolayers by the ALD technique of a nanoporous alumina structure (NPAS) obtained by the two-step anodization method were analyzed. The NPASs were coated with: (i) a single...
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Miia Mäntymäki, Mikko Ritala and Markku Leskelä
Lithium-ion batteries are the enabling technology for a variety of modern day devices, including cell phones, laptops and electric vehicles. To answer the energy and voltage demands of future applications, further materials engineering of the battery com...
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