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Alex Sagalovych,Viktor Popov,Vlad Sagalovych,Stas Dudnik,Roman Popenchuk
Pág. 6 - 15
The process of chemical vapor deposition of Mo and Mo-? coatings was studied by means of thermal decomposition of molybdenum hexacarbonyl. The kinetics of the coating growth in the range of 480 °C?540 °C and the pressure in the reaction volume ...
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