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Rafal Chodun, Bartosz Wicher, Katarzyna Nowakowska-Langier, Roman Minikayev, Marlena Dypa-Uminska and Krzysztof Zdunek
This paper presents the experimental results of high-temperature sputtering of nickel targets by the Gas Injection Magnetron Sputtering (GIMS) technique. The GIMS technique is a pulsed magnetron sputtering technique that involves the generation of plasma...
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