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Samiran Bairagi, Kenneth Järrendahl, Fredrik Eriksson, Lars Hultman, Jens Birch and Ching-Lien Hsiao
Glancing angle deposition (GLAD) of AlN nanostructures was performed at room temperature by reactive magnetron sputtering in a mixed gas atmosphere of Ar and N2. The growth behavior of nanostructures shows strong dependence on the total working pressure ...
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