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TOPICS IN LIGHTWAVE - MEMS OPTICAL SWITCHES - The authors describe various popular actuating mechanisms and switch architectures of MEMS optical switches. They also describe the basics of surface and bulk micromachining techniques used to fabricate MEMS d

Revista: IEEE COMMUNICATIONS MAGAZINE    Formato: Impreso

Tabla de contenido: Vol: 39 Num: 11 Par: 0 Año: 2001