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Xiaohui Yang, Philipp Kästner, Eireen Käkel, Marek Smolarczyk, Shujie Liu, Qingdang Li and Hartmut Hillmer
For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed. Three-dimensional electromechanical modeling including many non-...
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Basit Abdul, Vincenzo Mariano Mastronardi, Antonio Qualtieri, Luciana Algieri, Francesco Guido, Francesco Rizzi and Massimo De Vittorio
In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functional ...
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