|
|
|
|
|
Ying Song, Ning Zhang, Yujuan Liu, Liu Zhang and Zhaowu Liu
Variable-period scanning beam interference lithography (VP-SBIL) can be used to fabricate varied-line-spacing (VLS) plane gratings. The exposure phase modulation method to pattern a VLS grating with a desired groove density must be carefully devised. In ...
ver más
|
|
|
|
|