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Pol Ribes-Pleguezuelo, Denis Guilhot, Marta Gilaberte Basset, Erik Beckert, Ramona Eberhardt and Andreas Tünnermann
1960 is the birth year of both the laser and the Mars exploration missions. Eleven years passed before the first successful landing on Mars, and another six before the first rover could explore the planet?s surface. In 2011, both technologies were reunit...
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Robert Müller, Lilit Ghazaryan, Paul Schenk, Sabrina Wolleb, Vivek Beladiya, Felix Otto, Norbert Kaiser, Andreas Tünnermann, Torsten Fritz and Adriana Szeghalmi
High-density ruthenium (Ru) thin films were deposited using Ru(EtCp)2 (bis(ethylcyclopentadienyl)ruthenium) and oxygen by thermal atomic layer deposition (ALD) and compared to magnetron sputtered (MS) Ru coatings. The ALD Ru film growth and surface rough...
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Kristin Pfeiffer, Ulrike Schulz, Andreas Tünnermann and Adriana Szeghalmi
Antireflection (AR) coatings are indispensable in numerous optical applications and are increasingly demanded on highly curved optical components. In this work, optical thin films of SiO2, Al2O3, TiO2 and Ta2O5 were prepared by atomic layer deposition (A...
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