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Daniele M. Trucchi, Alessandro Bellucci, Marco Girolami, Matteo Mastellone and Stefano Orlando
Diamond is a wide bandgap semiconductor with excellent physical properties which allow it to operate under extreme conditions. However, the technological use of diamond was mostly conceived for the fabrication of ultraviolet, ionizing radiation and nucle...
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Tuung Luoh, Yu-Kai Huang, Yung-Tai Hung, Ling-Wuu Yang, Ta-Hone Yang and Kuang-Chao Chen
Titanium nitride (TiN) not only was utilized in the wear-resistant coatings industry but it was also adopted in barrier processes for semiconductor manufacturing. Barrier processes include the titanium (Ti) and TiN processes, which are commonly used as d...
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Takahiro Nomura, Teppei Oya, Noriyuki Okinaka and Tomohiro Akiyama
Pág. 1326 - 1332
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Arnott, Robert; Ponnekanti, Seshaiah; Taylor, Carl; Chaloupka, Heinz
Pág. 96 - 103
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