Resumen
Barrier heights of Au on hydrogen-/oxygen-/fluorine-/nitrogen-terminated diamond (H-/O-/F-/N-diamond) have been investigated by X-ray photoelectron spectroscopy. All of the H-/O-/F-/N-diamond surfaces have been formed on different areas of one diamond sample. An Au film with a thickness of 4 nm was evaporated to form Au/diamond contacts. Barrier height values for Au on H-/O-/F-/N-diamond contacts were determined to be -0.19, 1.71, 2.29, and 2.39 eV, respectively. Then, the surface of Au/diamond contacts was treated by 1000 eV Ar+ bombardment with different duration of time, resulting in a pinned barrier height of 1.83 eV independent of contact structures. In the end, the spatial distribution of the energy band diagram has been calculated by solving Poisson?s equation.