ARTÍCULO
TITULO

Enhanced beam currents of P2+, P3+, and P4+ for use in semiconductor ion implanters

V. I. Gushenets    
A. S. Bugaev    
E. M. Oks    
A. Hershcovitch    
B. M. Johnson    
T. V. Kulevoy    
H. J. Poole    
and A. Ya. Svarovsky    

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