Inicio  /  SCRIPTA MATERIALIA  /  Vol: 57 Núm: 7 Par: 0 (2007)  /  Artículo
ARTÍCULO
TITULO

Effect of microstructures on the electrical and optoelectronic properties of nanocrystalline Ta¿Si¿N thin films by reactive magnetron cosputtering

C.K. Chung and T.S.    

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