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Yongqiang Pan, Huan Liu, Zhuoman Wang, Jinmei Jia and Jijie Zhao
SiO2 thin films are deposited by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) technique using SiH4 and N2O as precursor gases. The stoichiometry of SiO2 thin films is determined by the X-ray photoelectron spectroscopy (XPS), and...
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Lubo? Podlucký, Andrej Vincze, Sona Kovácová, Juraj Chlpík, Jaroslav Kovác and Franti?ek Uherek
In this paper, the analysis of silicon oxynitride (SiON) films, deposited utilizing the plasma enhanced chemical vapor deposition (PECVD) process, for optical waveguides on silicon wafers is presented. The impact of N2O flow rate on various SiON film pro...
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Mauro Menichelli, Marco Bizzarri, Maurizio Boscardin, Mirco Caprai, Anna Paola Caricato, Giuseppe Antonio Pablo Cirrone, Michele Crivellari, Ilaria Cupparo, Giacomo Cuttone, Silvain Dunand, Livio Fanò, Omar Hammad Alì, Maria Ionica, Keida Kanxheri, Matthew Large, Giuseppe Maruccio, Anna Grazia Monteduro, Francesco Moscatelli, Arianna Morozzi, Andrea Papi, Daniele Passeri, Marco Petasecca, Silvia Rizzato, Alessandro Rossi, Andrea Scorzoni, Leonello Servoli, Cinzia Talamonti, Giovanni Verzellesi and Nicolas WyrschaddShow full author listremoveHide full author list
Hydrogenated amorphous silicon (a-Si:H) can be produced by plasma-enhanced chemical vapor deposition (PECVD) of SiH4 (silane) mixed with hydrogen. The resulting material shows outstanding radiation hardness properties and can be deposited on a wide varie...
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Mi-Young Park, Chun-Gon Kim and Joo-Hyung Kim
Reliability in various conditions for Li-ion batteries has been considered one of the most important factors when determining usability. Silica-based fabric has great potential to be an alternative material for electrode support, providing mechanical and...
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Eloisa Sardella, Roberto Gristina, Fiorenza Fanelli, Valeria Veronico, Gabriella Da Ponte, Jennifer Kroth, Francesco Fracassi and Pietro Favia
Plasma Enhanced?Chemical Vapor Deposition (PE-CVD) of polyethylene oxide-like (PEO)-like coatings represent a successful strategy to address cell-behavior on biomaterials. Indeed, one of the main drawbacks of organic and hydrophilic films, like PEO-like ...
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