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Sergey Alekseev, Natalia Polzikova and Valery Luzanov
The hybrid high overtone bulk acoustic wave resonators (HBARs) consisting of a piezoelectric film transducers and gallium gadolinium garnet substrates with yttrium iron garnet films (YIG-GGG-YIG) are used for experimental excitation and detection of acou...
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Suzana Petrovic, Nevena Bo?inovic, Vladimir Rajic, Danijela Stanisavljevic Ninkovic, Danilo Kisic, Milena J. Stevanovic and Emmanuel Stratakis
Arranged patterns obtained via ultrafast laser processing on the surface of Ti/Cu/Ti/Si and Ti/Zr/Ti/Si thin-film systems are reported. Two differently designed multilayer thin films Ti/Cu/Ti/Si and Ti/Zr/Ti/Si were deposited on silicon using the ion spu...
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Jiyoon Choi, Jiha Seong, Sangbin Park, Hyungmin Kim, Sangmo Kim, Kyung Hwan Kim and Jeongsoo Hong
Ag2O thin films have been applied in various devices, such as photodetectors, photocatalysts, and gas sensors, because of their excellent thermal stability, strong electrical properties, and stable structures. However, because various phases of silver ox...
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Evgeniya Ermakova, Sergey Sysoev, Irina Tsyrendorzhieva, Alexander Mareev, Olga Maslova, Vladimir Shayapov, Eugene Maksimovskiy, Irina Yushina and Marina Kosinova
We report an investigation into 1,4-Bis-N,N-(trimethylsilyl)piperazine (BTMSP) as a novel precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD). The thermal stability, temperature dependence of vapor pressure and th...
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Baek-Ju Lee, Kyu-Beom Lee, Min-Ho Cheon, Dong-Won Seo and Jae-Wook Choi
In this study, we conducted research on manufacturing molybdenum (Mo) thin films by a thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films are widely used as gate electrodes and electrodes in metal-oxide semiconductor ...
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