Plasma immersion ion charge state and mass spectrometer

Artículos similares

Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Acceso

Chunzhi Gong, Xiubo Tian, Shiqin Yang, Ricky K. Y. Fu, and Paul K. Chu

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS

Synthesis of aluminum nitride films by plasma immersion ion implantation-deposition using hybrid gas-metal cathodic arc gun

Acceso

Shen, L. Fu, R. K. Y. Chu, P. K. Pág. 719 - 724

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS

Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation

Acceso

Tang, D. L. Fu, R. K. Y. Tian, X. B. Chu, P. K. Pág. 2704 - 2708

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS

Hybrid evaporation: Glow discharge source for plasma immersion ion implantation

Acceso

Li, L. H. Poon, R. W. Y. Kwok, S. C. H. Chu, P. K. Wu, Y. Q. Zhang, Y. H. Pág. 4301 - 4304

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS

Enhancement of implantation energy using a conducting grid in plasma immersion ion implantation of dielectric/polymeric materials

Acceso

Fu, R. K. Y. Tian, X. Chu, P. K. Pág. 3697 - 3700

Revista: REVIEW OF SCIENTIFIC INSTRUMENTS