Inicio  /  Applied Sciences  /  Vol: 9 Par: 11 (2019)  /  Artículo
ARTÍCULO
TITULO

Large-Aperture Real-Time Compensated Collimating Wavefront Error Detection Method

Xueliang Zhu    
Dasen Wang    
Fengming Nie    
Bingcai Liu    
Hongjun Wang and Ailing Tian    

Resumen

This paper proposes a real-time compensated pentaprism scanning wavefront detection method to achieve real-time compensation for scanning errors occurring during prism movement along a guide rail. The method is based on existing pentaprism scanning wavefront detection technology and it is realized by applying self-collimation-based three-dimensional error compensation. Using theoretical and data analyses of a detection experiment, the reliability of the optimized pentaprism scanning detection method is verified, thus effectively ensuring the reasonable estimation of the interferometry surface measurement uncertainty.

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