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REVIEW OF SCIENTIFIC INSTRUMENTS
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REVIEW OF SCIENTIFIC INSTRUMENTS
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Vol: 76 Núm: 6 Par: 0 (2005)
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Artículo
ARTÍCULO
TITULO
Development of a spatially controllable chemical vapor deposition reactor with combinatorial processing capabilities
J. O. Choo
R. A. Adomaitis
L. Henn-Lecordier
Y. Cai
and G. W. Rubloff
Resumen
No disponible
PÁGINAS
pp. -
NÚMERO
Volumen: 76 Número: 6 Parte: 0 (2005)
MATERIAS
INGENIERÍA Y CONSTRUCCIÓN CIVIL
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Complex Systems Informatics and Modeling Quarterly
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Journal of Marine Science and Engineering
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