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ARTÍCULO
TITULO

Effect of Annealing in ITO Film Prepared at Various Argon-and-Oxygen-Mixture Ratios via Facing-Target Sputtering for Transparent Electrode of Perovskite Solar Cells

Yujin Kim    
Sung Hwan Joo    
Seong Gwan Shin    
Hyung Wook Choi    
Chung Wung Bark    
You Seung Rim    
Kyung Hwan Kim and Sangmo Kim    

Resumen

Normal perovskite solar cells (PSCs) consist of the following layers: transparent electrode, electron-transport layer (ETL), light-absorbing perovskite layer, hole-transport layer (HTL), and metal electrode. Energy, such as electricity, is produced through light absorbance and electron?hole generation/transport between two electrode types (metal film and transparent conducting film). Among stacked layers in a PSC, the transparent electrode plays the high-performance-power-conversion-efficiency role. Transparent electrodes should have high-visible-range transparency and low resistance. Therefore, in this study, we prepared indium tin oxide (ITO) films on a glass substrate by using facing-target sputtering without substrate heating treatment and investigate the heating-treatment effect on the ITO-film properties for perovskite solar cells (PSCs). Moreover, we fabricated PSCs with ITO films prepared at various oxygen flows during the sputtering process, and their energy-conversion properties are investigated.

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