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ARTÍCULO
TITULO

Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube

Zhuo Wang    
Ying Zhu    
Liu He Li    
Qiu Yuan Lu    
Fu Shun He    
Dan Dan Dun    
Fen Li    
Ricky K. Y. Fu    
and Paul K. Chu    

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