Redirigiendo al acceso original de articulo en 15 segundos...
Inicio  /  Coatings  /  Vol: 7 Núm: 12 Par: Decembe (2017)  /  Artículo
ARTÍCULO
TITULO

Microstructure and Mechanical Properties of TaN Thin Films Prepared by Reactive Magnetron Sputtering

Anna Zaman and Efstathios I. Meletis    

Resumen

Reactive magnetron sputtering was used to deposit tantalum nitride (Ta?N) thin films on Si substrate. The effect of varying the N2 percentage in the N2/Ar gas mixture on the Ta?N film characteristics was investigated. Mechanical and tribological properties were studied using nanoindentation and pin-on-disc wear testing. Decreasing the N2 content in the gas mixture was found to change the film structure from face centered cubic (fcc) TaN (from 25% to 10% N2) to highly textured fcc TaN (at 7% N2) to a mixture of fcc TaN1.13 and hexagonal Ta2N (at 5% N2), and finally to hexagonal Ta2N (at 3% N2). A high hardness of about 33 GPa was shown by the films containing the hexagonal Ta2N phase (5% and 3% N2). Decreasing the N2 content below 7% N2 was also found to result in microstructural refinement with grain size 5?15 nm. Besides the highest hardness, the film deposited with 3% N2 content exhibited the highest hardness/modulus ratio (0.13), and elastic recovery (68%), and very low wear rate (3.1 × 10-6 mm3·N-1·m-1).

 Artículos similares

       
 
Jaehui Bang and Eunkyung Lee    
In this study, the surface properties of marine structures were improved by applying a twin wire arc spray process to high-strength low alloys. The effect of Al and Mo contents in Ni-Al coatings on their mechanical and corrosion behaviors was analyzed us... ver más
Revista: Coatings

 
Masood Ur Rahman and Jing Li    
This paper presents experimental investigations on epoxy mortar produced using industrial wastes. In some recent studies, coal bottom ash and polyethylene terephthalate (PET) waste have been chosen as a filler to replace sand, and fly ash and silica fume... ver más
Revista: Applied Sciences

 
Alexey Prosviryakov and Andrey Bazlov    
In this work, we studied the effect of thermal exposure on the microstructure and mechanical properties of an Al-5 wt.% TiO2 composite material with additions of 5 wt.% Cu and 2 wt.% stearic acid as a process control agent (PCA), obtained by mechanical a... ver más
Revista: Applied Sciences

 
Ghasem Azimiroeen, Seyed Farshid Kashani-Bozorg, Martin Nosko and Saeid Lotfian    
Friction stir processing (FSP) offers a unique opportunity to tailor the microstructure and improve the mechanical properties due to the combination of extensive strains, high temperatures, and high-strain rates inherent to the process. Reactive friction... ver más
Revista: Applied Sciences

 
Zahraa Jwaida, Anmar Dulaimi, Nuha Mashaan and Md Azree Othuman Mydin    
Researchers have been driven to investigate sustainable alternatives to cement production, such as geopolymers, due to the impact of global warming and climate change resulting from greenhouse gas emissions. Currently, they are exploring different method... ver más
Revista: Infrastructures