Resumen
Cr?Si?O?N coatings with different oxygen contents were deposited by multi-arc ion plating, where various O2/(N2 + O2) reactive gas rates were adopted. The XRD and XPS results showed that the CrN crystals disappeared with the increasing of the oxygen flux ratio to 10 at.%. The microhardness of all the Cr?Si?O?N coatings was approximately 2000 Hv0.05, which were dramatically plummeted compared to that of the Cr?Si?N coatings (?3300 Hv0.05). The Cr?Si?O?N coatings were annealed under 800 °C and 1200 °C in the air atmosphere for 2 h to study the high-temperature oxidation resistance of the coatings. Meanwhile, Cr?Si?O?N coatings with different O2/(N2 + O2) rates were also used to carry out the corrosion resistance testing using the electrochemical working station in 3.5% NaCl solution under free air condition at room temperature. The results indicated that the coatings containing oxygen were more vulnerable to the high-temperature destruction and more easily corroded in the NaCl electrolyte.