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Inicio  /  Instruments  /  Vol: 7 Par: 3 (2023)  /  Artículo
ARTÍCULO
TITULO

Design of Monolithic Bi-Layer High-Z PAL-Si Hard X-ray CMOS Image Sensors for Quantum Efficiency Enhancement

Eldred Lee    
Kevin D. Larkin    
Xin Yue    
Zhehui Wang    
Eric R. Fossum and Jifeng Liu    

Resumen

This article experimentally investigates the inception of an innovative hard X-ray photon energy attenuation layer (PAL) to advance high-energy X-ray detection (20?50 keV). A bi-layer design with a thin film high-Z PAL on the top and Si image sensor on the bottom has previously demon-strated quantum yield enhancement via computational methods by the principle of photon energy down conversion (PEDC), where high-energy X-ray photon energies are attenuated via inelastic scattering down to =10 keV, which is suitable for efficient photoelectric absorption by Si. Quantum yield enhancement has been experimentally confirmed via a preliminary demonstration using PAL-integrated Si-based CMOS image sensors (Si CIS). Furthermore, substituting the high-Z PAL with a lower-Z material?Sn?and alternatively coupling it with a conventional scintillator ma-terial?Lutetium-yttrium oxyorthosilicate (LYSO)?have been compared to demonstrate the most prominent efficacy of monolithic integration of high-Z PAL on Si CIS to detect hard X-rays, paving the way for next-generation high-energy X-ray detection methods.