Resumen
This paper proposes a novel gear-like disk resonator (GDR). The design, fabrication, and characterization of GDR are presented. In comparison with a ring-like disk resonator (RDR), a GDR replaces the circular rings with meander-shaped rings consisting of linear beams. The finite element method (FEM) is implemented, and the simulation results show that the GDR has a much lower frequency and effective stiffness, higher quality factor (Q), and better immunity to crystal orientation error. Affected by high Q and small frequency splits, the mechanical sensitivity (Smech) is shown to increase greatly. GDR and RDR with the same structure parameters are built side-by-side on the same wafer, and prototypes are fabricated through the SOI fabrication technique. The frequency response test and ring-down test are implemented using a readout circuit under a vacuum condition (5 Pa) at room temperature. The frequency split (9.1 Hz) of the GDR is about 2.8 times smaller than that (25.8 Hz) of the RDR without electrostatic tuning. Compared with the RDR, the Q (19.2 k) and decay time constant (0.59 s) of the GDR are improved by 145% and 236%, respectively. The experimental results show great promise for the GDR being used as a gear-like disk resonator gyroscope (GDRG).