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Inicio  /  Applied Sciences  /  Vol: 9 Par: 15 (2019)  /  Artículo
ARTÍCULO
TITULO

Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material

Cheng Zhang    
Yijin Liu    
Mingge Wu and Ningbo Liao    

Resumen

This study may promote graphite to become a basic MEMS material, which is significant for the expansion of the scope and field of MEMS applications.

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